Comparing to the routine experiment, this method need much less samples, much less test time, much lower cost, instead give much higher efficiency . the results have comparability with the results of the routine test method 与常规试验对比证明,本试验方法所需样品少,测试时间短,成本低,效率高,试验结果同常规方法有可比性。
Because the routine test method could not meet the requirement of modern devices, the author put forward a new test method called temperature ramp measurement ( trm ) . by this method, we can observe dynamically the whole process of devices " degradation, so the estimation value of life and failure active energy can be extracted accurately 针对目前常规评价方法不能适应当前微电子器件快速发展的需求,提出了恒定电应力的温度斜坡法(简称trm法),动态观察和分析器件退化的全过程,应用此方法给出了实验样品的失效激活能和寿命预测值,并与常规方法进行了比较,得到了比较一致的结果。